Terahertz Spectroscopy Device "Tera Evaluator"
Achieving non-destructive and non-contact measurement of electrical characteristics of 4-inch and 6-inch wafers!
The "Tera Evaluator" is a new terahertz spectrometer that incorporates ellipsometry technology. Its use of a reflective optical system makes it suitable for measuring opaque materials. It comes standard with a mapping stage for measuring 4-inch and 6-inch wafers, enabling non-contact and non-destructive inspection of semiconductor wafers. By measuring the time waveform of the electric field intensity of electromagnetic wave pulses, both the electric field intensity and phase information can be measured simultaneously. By analyzing the differences in time waveforms between the reference and the sample, the frequency dependence of the sample's complex permittivity (complex refractive index) can be obtained. 【Features】 ■ Non-destructive and non-contact measurement of carrier concentration and mobility ■ Capable of measuring complex permittivity in the terahertz range ■ Liquid samples can also be measured ■ Standard software for analysis: THz Analysis ■ A system that allows external input of lasers can be constructed *For more details, please refer to the PDF document or feel free to contact us.
- Company：日邦プレシジョン
- Price：Other
